真空镀膜机的一些常见问题与解决办法
随着镀膜技术的快速增长,各种类型的真空镀膜机也开始逐渐出现。但是论起薄膜的均匀性,恐怕所有真空设备镀制薄膜的均匀性都会受到某种因素影响,现在我们就溅控溅射镀膜机来看看造成不均匀的因素有哪些?
With the rapid growth of coating technology, various types of vacuum coating machines are beginning to appear gradually. But considering the uniformity of film, I'm afraid that the uniformity of all the thin films of vacuum equipment will be affected by some factors. Now we'll take a sputter control sputtering machine to see what factors are causing the uneven.
对此,真空镀膜机厂家指出,它的运作原理其实很简单。就是通过真空状态下正交磁场使电子轰击氩气形成的氩离子再轰击靶材,靶材离子沉积于工件表面成膜。如此车灯镀膜机厂家就该考虑与膜层厚度的均匀性有关的有真空状态、磁场、氩气这三个方面。真空状态就需要抽气系统来控制的,每个抽气口都要同时开动并力度一致,这样就可以控制好抽气的均匀性,如果抽气不均匀,在真空室内的压强就不能均匀了,压强对离子的运动是存在一定的影响的。另外抽气的时间也要控制,太短会造成真空度不够,但太长又浪费资源,不过有真空机的存在,要控制好还是不成问题的。
To this, the vacuum coating machine manufacturer points out that its operation principle is very simple. It is through the orthogonal magnetic field in the vacuum state that the argon ion, formed by the electron bombardment of argon, bombards the target, and the target ion is deposited on the surface of the workpiece. So the manufacturer of the lamp coating machine should consider the three aspects of the vacuum state, magnetic field and argon, which should be concerned with the uniformity of the thickness of the film. You need to control the vacuum pumping system, each exhaust port will be moving at the same time and efforts, so that we can control the uniformity of pumping, pumping if uneven pressure in the vacuum chamber is not uniform, pressure on the motion of ions is the presence of a certain effect. In addition, the time to pump gas is also controlled. Too short will cause vacuum degree is not enough, but it is too long and waste resources. But the existence of vacuum machine is still not a problem.
一、真空镀膜对环境的要求
1. The requirements for the vacuum coating on the environment
加工真空镀膜工艺衬底(基片)表面的清洁处理很重要。基片进入镀膜室前均应进行认真的镀前清洁处理,达到工件去油、去污和脱水的目的。
It is important to clean the surface of the substrate (substrate) on the process of vacuum coating process. Before the substrate enters the coating chamber, the pre plating cleaning treatment should be carried out to achieve the purpose of deoil, decontamination and dehydration of the workpiece.
基片表面污染来自零件在加工、传输、包装过程所粘附的各种粉尘、润滑油、机油、抛光膏、油脂、汗渍等物;零件表面在潮湿空气中生成的氧化膜;零件表面吸收和吸附的气体。真空镀膜厂家这些污物基本上均可采用去油或化学清冼方法将其去掉。
The substrate surface contamination from components in processing, transport, packaging process by adhesion of dust, lubricating oil, engine oil, grease, polishing paste, perspiration and other parts; surface generation in the moist air film; gas absorption and adsorption of surface parts. The vacuum coating manufacturer can use the deoiling or chemical cleaning method to remove it.
对经过清洗处理的清洁表面,不能在大气环境中存放,要用封闭容器或保洁柜贮存,以减小灰尘的沾污。用刚氧化的铝容器贮存玻璃衬底,可使碳氢化合物蒸气的吸附减至最小。因为这些容器优先吸附碳氢化合物。对于高度不稳定的、对水蒸气敏感的表面,一般应贮存在真空干燥箱中。
Clean surface, which is cleaned, can not be stored in the atmosphere. It should be stored in a closed container or a cleaning cabinet to reduce the contamination of the dust. The use of a rigid oxidizing aluminum container to store the glass substrate can minimize the adsorption of hydrocarbon vapors. Because these containers first adsorb hydrocarbons. For highly unstable, vapor sensitive surfaces, a vacuum drying box should generally be stored.
清除镀膜室内的灰尘,设置清洁度高的工作间,保持室内高度清洁是镀膜工艺对环境的基本要求。空气湿度大的地区,除镀前要对基片、真空室内各部件认真清洗外,还要进行烘烤除气。要防止油带入真空室内,注意油扩散泵返油,对加热功率高的扩散泵必须采取挡油措施。
Cleaning the dust in the coating room, setting up a clean workroom and keeping the room clean are the basic requirements of the coating process to the environment. In the area with large air humidity, it is necessary to bake and degassing except for the earnest cleaning of the substrate and the parts of the vacuum chamber before plating. In order to prevent oil into the vacuum chamber, pay attention to the oil diffusion pump to return oil, it is necessary to take oil retaining measures for the diffusion pump with high heating power.
二、镀层与镀膜的基本原理
Two, the basic principle of coating and coating
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One
原材料与基本原理
Raw materials and basic principles
原材料都是树脂、聚合物、铁氟隆、硅酮、丙烯酸、硅酸盐等,辅料、配方与量度有所不同。例添加的乳化剂,不同的量相调和,乳化出来的状态就不一样,水状、乳状、膏状都可以实现。这些物质经乳化破乳后,部份渗透或形成薄膜。
The raw materials are all resin, polymer, ferleon, silicone, acrylic acid, silicate and so on. The auxiliary materials, formula and measurement are different. The emulsifier added by the example is mixed with different quantities, and the state of emulsification is different, and the water, milk and paste can be realized. After emulsifying and demulsification, the substances partially permeate or form thin films.
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Two
特点和区别
Characteristics and differences
镀层:渗透功能好(要视原材料颗粒大小),表面光滑度更优,对漆面较多“毛细孔”、粗糙、重喷过漆、漆面本身较硬需要增加光亮度的欧美车系漆面比较适用。
Coating: good penetration function (depending on the particle size of raw material), better surface smoothness, and more suitable for the paint surface, such as "coarse pores", rough, heavy spray paint and hard paint surface, which needs increasing brightness.
镀膜:而镀膜产品添加了成膜助剂与固化剂,真空镀膜厂家使其瞬间成膜,性质相应的发生了改变。例如硬度比封釉更高,对需要提升漆面硬度的漆面(如日韩车系)比较适用。
Coating: the coating product added the film forming agent and the curing agent, the vacuum coating manufacturer made the film into the film instantaneously, and the corresponding property changed. For example, hardness higher than the glaze, to enhance the hardness of paint paint (such as cars for Japan and South Korea).
特别说明:从过滤和反射紫外线的功能来说,格耐镀层比镀膜更优。因其不需添加成膜助剂与固化剂等成份,更纯粹的石英玻璃分子覆盖层+融合层,它的双重过滤和反射紫外线能力更强。值得担心的是,劣质的镀膜产品使用非环保性成膜助剂,甚至会造成对漆面的二次化学伤害。
Special note: from the filtration and UV reflectance function is better than grass coating coating. Because it does not need to add film forming AIDS and curing agents and other components, a more pure quartz glass molecular covering layer + fusion layer, its dual filtration and ultraviolet reflection ability is stronger. It is worth worrying that the inferior coating products use non environmental protection film auxiliaries, and even cause the two chemical damage to the paint.
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Three
防护层的主要性能
The main performance of the protective layer
①预防原车漆氧化与褪色:阻隔紫外线,最大限度减少紫外线的透射伤害。
(1) preventing the oxidation and fading of the original car paint: preventing ultraviolet radiation to minimize the transmission damage of ultraviolet light.
②增加漆面光亮度:晶莹透亮的玻璃分子使汽车漆面流光溢彩,光芒耀人。
The increase of paint brightness: translucent glass molecular vehicle Qimian Ambilight, ray Yao people.
③提升漆面硬度:提升抗磨损、抗划痕性能。
Improve the hardness of the lacquer surface: improve the resistance to wear and scratch.
④防止化学性侵害,延长漆面寿命:如碱性洗车、酸雨盐雾、虫液树胶、高温严寒对车漆的伤害。
(4) to prevent chemical damage and prolong the life of lacquer surface: such as alkaline washing, acid rain salt fog, insect liquid gum, high temperature cold injury to car paint.
⑤增加车表的光滑度:手感丝滑,减少静电、尘埃附着及风阻系数,使日常养护更便捷。
Increase the smoothness of the car meter: slippery hand, reduce static, dust adhesion and wind resistance coefficient, make daily maintenance more convenient.