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一、电子枪安装与维护 1. Installation and maintenance of electronic gun 电子枪蒸发源控制系统是由电子枪灯丝电源、高压电源、扫描电源、坩埚驱动电源、蒸发源等组成一个电子枪控制电柜。 The control system of electron gun evaporation source consists of an electron gun filament power supply, a high voltage power supply, a scanning power supply, a crucible driving power source and an evaporation source. 电子枪控制电柜内含有高压，在工作前必须保证柜门各个联锁装置正常工作，非专业人员不得打开电柜门，电子枪在工作时不得打开电柜门，整个电柜必须有良好的接地并与机台接地连接。 The electronic gun control cabinet contains high voltage. Before working, all the interlocking devices of the cabinet must work normally. The non professional personnel can't open the cabinet door. When the electron gun is working, the cabinet door must not be opened. The whole cabinet must have good grounding and connect to the machine. 电子枪蒸发源安装在真空室底板上，必须与底板有良好的接地效果，安装蒸发源必须使用不锈钢螺丝来固定，周边200mm以内不得有导磁的物体，否则会影响到电子枪的光斑成表，造成电子性能的不良。电子枪档板应尽量装在蒸发源坩埚的中心上30mm处，以不影响电子束的发射为好。 The electron gun evaporation source installed in the vacuum chamber on the floor, must have a good grounding effect and floor installation, evaporation source must be used stainless steel screws, there shall be no less than 200mm around the magnetic objects, otherwise it will affect the electron gun beam into tables, resulting in electronic performance bad. The electronic gun plate should be installed at the center of the crucible of the evaporation source as far as possible at 30mm, so as not to affect the emission of the electron beam. 电子枪蒸发源是一个精密机械加工体，在工作时必须保证有良好的冷却水，如过高的温度会影响电子束的成型及各密封圈的性能。 The source of electron gun evaporation is a precision machined body. When working, good cooling water must be guaranteed. If the temperature is too high, the shaping of electron beam and the performance of each seal ring will be affected.