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（1）真空镀膜对环境的要求。 加工真空镀膜工艺衬底(基片)表面的清洁处理很重要。基片进入镀膜室前均应进行认真的镀前清洁处理，达到工件去油、去污和脱水的目的。 　　基片表面污染来自零件在加工、传输、包装过程所粘附的各种粉尘、润滑油、机油、抛光膏、油脂、汗渍等物;零件表面在潮湿空气中生成的氧化膜;零件表面吸收和吸附的气体。真空镀膜厂家这些污物基本上均可采用去油或化学清冼方法将其去掉。 　　对经过清洗处理的清洁表面，不能在大气环境中存放，要用封闭容器或保洁柜贮存，以减小灰尘的沾污。用刚氧化的铝容器贮存玻璃衬底，可使碳氢化合物蒸气的吸附减至最小。因为这些容器优先吸附碳氢化合物。对于高度不稳定的、对水蒸气敏感的表面，一般应贮存在真空干燥箱中。 　　清除镀膜室内的灰尘，设置清洁度高的工作间，保持室内高度清洁是镀膜工艺对环境的基本要求。空气湿度大的地区，除镀前要对基片、真空室内各部件认真清洗外，还要进行烘烤除气。要防止油带入真空室内，注意油扩散泵返油，对加热功率高的扩散泵必须采取挡油措施。 （2）镀层与镀膜的基本原理 (1) the requirement of the vacuum coating on the environment. It is important to clean the surface of the substrate (substrate) on the processing vacuum coating process. Before the substrate enters the coating chamber, the pre plating cleaning treatment should be carried out to achieve the purpose of deoil, decontamination and dehydration of the workpiece. substrate surface contamination from components in processing, transport, packaging process by adhesion of dust, lubricating oil, engine oil, grease, polishing paste, perspiration and other parts; surface generation in the moist air film; gas absorption and adsorption of surface parts. The vacuum coating manufacturer can use the deoiling or chemical cleaning method to remove it. The clean surface of the cleaned can not be stored in the atmosphere, and should be stored in a closed container or a cleaning cabinet to reduce the contamination of the dust. The use of a rigid oxidizing aluminum container to store the glass substrate can minimize the adsorption of hydrocarbon vapors. Because these containers first adsorb hydrocarbons. For highly unstable, vapor sensitive surfaces, a vacuum drying box should generally be stored. cleaning the dust in the coating room, setting up a clean workroom and keeping the room clean is the basic requirement of the coating process to the environment. In the area with large air humidity, it is necessary to bake and degassing except for the earnest cleaning of the substrate and the parts of the vacuum chamber before plating. In order to prevent oil into the vacuum chamber, pay attention to the oil diffusion pump to return oil, it is necessary to take oil retaining measures for the diffusion pump with high heating power. The basic principle of (2) coating and coating