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首先开水、电、气→总电源→开维持泵→开扩散泵加热→开粗抽泵→开预抽阀→关预抽阀→开粗抽阀→开罗茨泵→如有离子轰击，开轰击30秒，关轰击→开真空计→当真空到6.0~7.0pa时，关粗抽阀→开前置阀→开精抽阀，当真空达到7x10-3pa，开转架→开始镀膜操作→镀膜完毕后，关闭真空计、离子源→关精抽阀，前置阀→关罗茨泵→开抽气阀，取件→上料，反复开始操作。
First of all, boiling water, electricity, gas total power supply open maintenance pump open diffusion pump heating open pre-pump open pre-pump valve close pre-pump valve open coarse pump valve open Cairoz pump if there is ion bombardment, open bombardment for 30 seconds, close bombardment open vacuum meter when the vacuum to 6.0 ~ 7.0 pa, close the pre-valve open the fine pump valve, when the vacuum reached. At 7x10-3pa, after opening the rotating frame, starting the coating operation, finishing the coating, closing the vacuum gauge, ion source, closing the precision pumping valve, the front valve, closing the Roots pump, opening the exhaust valve, taking out the parts, loading and starting the operation repeatedly.
特别注意：
Special attention:
1、  设备停用时，镀膜室要保持真空状态，减少内表面气体的吸附，防止氧化。
1. When the equipment is shut down, the coating chamber should be kept in a vacuum state to reduce the adsorption of gas on the inner surface and prevent oxidation.
2、  冷却水通道场下才能对扩散泵进行加热，未经充分冷却的泵不得与大气接触，防止氧化。
2. The diffusion pump can only be heated under the cooling water channel field. The pump which has not been fully cooled must not contact with the atmosphere to prevent oxidation.
3、  要保证机器内扩散泵和机械泵的油定期检查和更换。
3, to ensure that the diffusion pump and mechanical pump in the machine regularly check and replace the oil.
4、  设备运行中遇有停电或其它事故发生，须先停扩散泵，关精抽阀，前置阀和真空计。
4. If power failure or other accidents occur during the operation of the equipment, the diffusion pump must be stopped, the fine suction valve, the pre-valve and the vacuum meter must be shut down.
5、  产品做完下班后，关了扩散泵后须待温度降低至60℃后才能关维持泵。
5. After the product is finished, after the pump is shut off, the temperature must be reduced to 60 degrees.