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真空镀膜对环境的要求。
真空镀膜对环境的要求。
Environmental requirements of vacuum coating.
加工真空镀膜工艺衬底(基片)表面的清洁处理很重要。基片进入镀膜室前均应进行认真的镀前清洁处理，达到工件去油、去污和脱水的目的。
It is very important to clean the surface of substrate (substrate) in vacuum plating process. Before the substrate enters the coating chamber, it should be carefully cleaned before plating to achieve the purpose of degreasing, decontamination and dehydration of the workpiece.
基片表面污染来自零件在加工、传输、包装过程所粘附的各种粉尘、润滑油、机油、抛光膏、油脂、汗渍等物;零件表面在潮湿空气中生成的氧化膜;零件表面吸收和吸附的气体。真空镀膜厂家这些污物基本上均可采用去油或化学清冼方法将其去掉。
Substrate surface contamination comes from various dust, lubricant, oil, polishing paste, grease, sweat stain, etc. adhering to parts in the process of processing, transmission and packaging; oxide film formed on parts surface in moist air; gas absorbed and absorbed on parts surface. These contaminants can be removed by degreasing or chemical cleaning in vacuum coating factories.
对经过清洗处理的清洁表面，不能在大气环境中存放，要用封闭容器或保洁柜贮存，以减小灰尘的沾污。用刚氧化的铝容器贮存玻璃衬底，可使碳氢化合物蒸气的吸附减至最小。因为这些容器优先吸附碳氢化合物。对于高度不稳定的、对水蒸气敏感的表面，一般应贮存在真空干燥箱中。
For cleaned surfaces, they should not be stored in atmospheric environment. Closed containers or cleaning cabinets should be used to reduce dust contamination. The adsorption of hydrocarbon vapor can be minimized by storing glass substrates in rigidly oxidized aluminium containers. Because these containers preferentially adsorb hydrocarbons. For highly unstable surface sensitive to water vapor, it should generally be stored in a vacuum drying box.
清除镀膜室内的灰尘，设置清洁度高的工作间，保持室内高度清洁是镀膜工艺对环境的基本要求。空气湿度大的地区，除镀前要对基片、真空室内各部件认真清洗外，还要进行烘烤除气。要防止油带入真空室内，注意油扩散泵返油，对加热功率高的扩散泵必须采取挡油措施。
Cleaning up the dust in the coating room, setting a high cleanliness workshop and keeping the indoor high cleanliness are the basic requirements of the coating process for the environment. In areas with high air humidity, besides carefully cleaning the components of the substrate and vacuum chamber before plating, baking and degassing should also be carried out. In order to prevent oil from being brought into vacuum chamber, attention should be paid to oil return of oil diffusion pump. Oil blocking measures must be taken for diffusion pump with high heating power.
Environmental requirements of vacuum coating.
加工真空镀膜工艺衬底(基片)表面的清洁处理很重要。基片进入镀膜室前均应进行认真的镀前清洁处理，达到工件去油、去污和脱水的目的。
It is very important to clean the surface of substrate (substrate) in vacuum plating process. Before the substrate enters the coating chamber, it should be carefully cleaned before plating to achieve the purpose of degreasing, decontamination and dehydration of the workpiece.
基片表面污染来自零件在加工、传输、包装过程所粘附的各种粉尘、润滑油、机油、抛光膏、油脂、汗渍等物;零件表面在潮湿空气中生成的氧化膜;零件表面吸收和吸附的气体。真空镀膜厂家这些污物基本上均可采用去油或化学清冼方法将其去掉。
Substrate surface contamination comes from various dust, lubricant, oil, polishing paste, grease, sweat stain, etc. adhering to parts in the process of processing, transmission and packaging; oxide film formed on parts surface in moist air; gas absorbed and absorbed on parts surface. These contaminants can be removed by degreasing or chemical cleaning in vacuum coating factories.
对经过清洗处理的清洁表面，不能在大气环境中存放，要用封闭容器或保洁柜贮存，以减小灰尘的沾污。用刚氧化的铝容器贮存玻璃衬底，可使碳氢化合物蒸气的吸附减至最小。因为这些容器优先吸附碳氢化合物。对于高度不稳定的、对水蒸气敏感的表面，一般应贮存在真空干燥箱中。
For cleaned surfaces, they should not be stored in atmospheric environment. Closed containers or cleaning cabinets should be used to reduce dust contamination. The adsorption of hydrocarbon vapor can be minimized by storing glass substrates in rigidly oxidized aluminium containers. Because these containers preferentially adsorb hydrocarbons. For highly unstable surface sensitive to water vapor, it should generally be stored in a vacuum drying box.
清除镀膜室内的灰尘，设置清洁度高的工作间，保持室内高度清洁是镀膜工艺对环境的基本要求。空气湿度大的地区，除镀前要对基片、真空室内各部件认真清洗外，还要进行烘烤除气。要防止油带入真空室内，注意油扩散泵返油，对加热功率高的扩散泵必须采取挡油措施。
Cleaning up the dust in the coating room, setting a high cleanliness workshop and keeping the indoor high cleanliness are the basic requirements of the coating process for the environment. In areas with high air humidity, besides carefully cleaning the components of the substrate and vacuum chamber before plating, baking and degassing should also be carried out. In order to prevent oil from being brought into vacuum chamber, attention should be paid to oil return of oil diffusion pump. Oil blocking measures must be taken for diffusion pump with high heating power.
