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Cautions for Use of Coating Machine
1、定期清洁真空室并尽量抹干，每次都彻底洗干净，以免造成越来越难洗的现象。烘干后再镀膜，头一炉应比原来延长四倍时间才镀膜。
1. Clean the vacuum chamber regularly and wipe it as dry as possible. Wash it thoroughly every time, so as not to cause more and more difficult to wash. After drying, the first stove should be four times longer than the original before coating.
2、定期更换扩散泵油，更换真空泵及罗茨泵油。更换扩散泵油前一定要确认真空度是否低于1X102Pa，扩散泵里面的油温是否彻底冷却到常温状态后，方可进行加热或充大气进行拆卸，否则会产生伤害人的严重后果。
2. Regular replacement of diffusion pump oil, vacuum pump and Roots pump oil. Before replacing the oil of the diffusion pump, it is necessary to confirm whether the vacuum is lower than 1X102Pa and whether the oil temperature in the diffusion pump is completely cooled to normal temperature before heating or filling the atmosphere for disassembly, otherwise serious consequences will occur.jindai.75ix.cn    ziwei.75ix.cn   yuyemei.75ix.cn
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3、平时整个系统要保持真空状态，工作前才充入气体，不要使真空室长期暴露在大气中。
3. In peacetime, the whole system should be kept in a vacuum state. Gas should be filled before working, and the vacuum chamber should not be exposed to the atmosphere for a long time.
4、经常检查胶封是否良好，特别是动密封圈，定期给动密封处加上真空脂。
4. Check the sealing regularly, especially the dynamic seal ring, and add vacuum grease to the dynamic seal regularly.
5、定期检查电气元件，清除灰尘，更换烧坏的元器件。
5. Regular inspection of electrical components, dust removal, replacement of burnt components.