真空镀膜机使用步骤
电控柜操作
Electric control cabinet operation
1. 开水泵、气源。
1. Boiling water pump and air source.
2. 开总电源。
2. Turn on the main power supply.
3. 开维持泵、真空计电源,真空计档位置V1位置,等待其值小于10后,再进入下一步操作。约需5分钟。
3. Turn on and maintain the power supply of the pump and vacuum gauge, and the position of the vacuum gauge V1. Wait until its value is less than 10, then proceed to the next step. It takes about five minutes.
4. 开机械泵、预抽,开涡轮分子泵电源、并启动,真空计开关换到V2位置,抽到小于2为止,约需20分钟。
4. Turn on the mechanical pump, pre-pumping, Turbomolecular pump power supply, and start up. The vacuum gauge switch changes to V2 position, pumping to less than 2, about 20 minutes.
5. 观察涡轮分子泵读数到达250以后,关预抽,开前级泵和高真空阀继续抽真空,抽真空到达一定程度后才能开右边的高真空表头,观察真空度。真空到达2×10-3以后才能打开电子枪电源。
5. After the reading of turbomolecular pump reaches 250, turn off the pre-pumping, open the front stage pump and high vacuum valve and continue to vacuum. After the vacuum reaches a certain level, the high vacuum meter on the right side can be opened to observe the vacuum degree. The power supply of the gun can not be turned on until the vacuum reaches 2 x 10-3.