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光学镀膜机主要由真空镀膜机室、真空抽气机组及电柜（控制电柜、电子枪电柜）组成，其广泛应用于微电子、光学成膜、民用装饰、表面工程等领域。
Optical coating machine is mainly composed of vacuum coating room, vacuum pumping unit and cabinet (control cabinet, electronic gun cabinet). It is widely used in microelectronics, optical film forming, civil decoration, surface engineering and other fields.
光学镀膜设备工作原理是在高真空状态下、利用电子束对金属或非金属材料加热到适当的温度，材料受热后蒸发成蒸汽分子。它的平均自由程比蒸发源至被蒸发基片距离大，蒸发出来的蒸汽分子向四处直射，碰到基片就沉积在基片表面形成膜层。
The working principle of optical coating equipment is to use electron beam to heat metal or non-metal materials to appropriate temperature under high vacuum, and then evaporate into vapor molecules. Its average free path is larger than the distance from the evaporation source to the evaporated substrate. The evaporated vapor molecules shoot directly around and deposit on the surface of the substrate to form a film.