真空镀膜机电控柜操作
真空镀膜机电控柜操作
Operation of vacuum coating electromechanical control cabinet
1. 开水泵、气源。
1. Water pump and air source.
2. 开总电源。
2. Turn on the main power supply.
3. 开维持泵、真空计电源,真空计档位置V1位置,等待其值小于10后,再进入下一步操作。约需5分钟。
3. Turn on the power supply of maintenance pump and vacuum gauge, position V1 of vacuum gauge, wait until the value is less than 10, and then enter the next operation. It will take about 5 minutes.
4. 开机械泵、予抽,开涡轮分子泵电源、启动,真空计开关换到V2位置,抽到小于2为止,约需20分钟。
4. Turn on the mechanical pump and pre pumping, turn on the power supply and start of the turbine molecular pump, switch the vacuum gauge switch to V2 position, and pump until it is less than 2, about 20 minutes.
5. 观察涡轮分子泵读数到达250以后,关予抽,开前机和高阀继续抽真空,抽真空到达一定程度后才能开右边的高真空表头,观察真空度。真空到达2×10-3以后才能开电子枪电源。
5. After the reading of the turbine molecular pump reaches 250, close the pre pumping, open the front unit and the high valve to continue vacuumizing, and only after the vacuumizing reaches a certain degree can the high vacuum meter on the right be opened to observe the vacuum degree. When the vacuum reaches 2 × 10-3, the gun can be powered on.