| [科普]真空镀膜机设备有哪些分类？ |
| 添加时间：2018/1/9 15:43:14 浏览次数： |
| 在真空镀膜设备中需要镀膜的被成为基片，镀的材料被成为靶材。基片与靶材同在真空腔中。蒸发镀膜一般是加热靶材使表面组分以原子团或离子形式被蒸发出来，并且沉降在基片表面，通过成膜过程形成薄膜。 In the vacuum coating equipment, the coating material is made to be the substrate, and the plating material is the target. The substrate and the target are in the vacuum chamber. Generally, the evaporating coating is heated by target, which evaporates the surface components in the form of atoms or ions and settles on the surface of the substrate, forming the thin film through the process of film formation. 真空镀膜机对于溅射类镀膜，可以简单理解为利用电子或高能激光轰击靶材，并使表面组分以原子团或离子形式被溅射出来，并且最终沉积在基片表面，经历成膜过程，最终形成薄膜。炉体可选择由不锈钢、碳钢或它们的组合制成的双层水冷结构。 For the sputtering coating, vacuum coating machine can be understood simply as that the target is bombarded with electrons or high-energy laser, and the surface components are spun out in the form of atoms or ions, and finally deposited on the substrate surface, and then form the thin film. The furnace body can choose a double layer water cooling structure made of stainless steel, carbon steel or their combination. |
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