| 真空镀膜对环境的要求 |
| 添加时间：2018/10/19 11:34:43 浏览次数： |
| 加工真空镀膜工艺衬底(基片)表面的清洁处理很重要。基片进入镀膜室前均应进行认真的镀前清洁处理，达到工件去油、去污和脱水的目的。 Cleaning the surface of substrate (substrate) is very important in processing vacuum coating process. Before the substrate enters the coating room, it should be carefully cleaned before plating to achieve the goal of oil removal, decontamination and dehydration of the workpiece. 基片表面污染来自零件在加工、传输、包装过程所粘附的各种粉尘、润滑油、机油、抛光膏、油脂、汗渍等物;零件表面在潮湿空气中生成的氧化膜;零件表面吸收和吸附的气体。真空镀膜厂家这些污物基本上均可采用去油或化学清冼方法将其去掉。 Substrate surface contamination comes from various dust, lubricating oil, oil, polishing paste, grease, sweat stains and other substances adhered to the parts in the process of processing, transmission and packaging; oxide film formed on the surface of the parts in humid air; gas absorbed and absorbed on the parts surface. These filth can be removed by vacuum or chemical cleaning. 对经过清洗处理的清洁表面，不能在大气环境中存放，要用封闭容器或保洁柜贮存，以减小灰尘的沾污。用刚氧化的铝容器贮存玻璃衬底，可使碳氢化合物蒸气的吸附减至最小。因为这些容器优先吸附碳氢化合物。对于高度不稳定的、对水蒸气敏感的表面，一般应贮存在真空干燥箱中。 Clean surfaces that have been cleaned can not be stored in an atmospheric environment, but should be stored in closed containers or cleaning cabinets to reduce dust contamination. The adsorption of hydrocarbon vapor can be minimized by storing the glass substrate with a rigid aluminum vessel. Because these containers preferentially adsorb hydrocarbons. For highly unstable surfaces sensitive to steam, they should be stored in vacuum drying boxes. 清除镀膜室内的灰尘，设置清洁度高的工作间，保持室内高度清洁是镀膜工艺对环境的基本要求。空气湿度大的地区，除镀前要对基片、真空室内各部件认真清洗外，还要进行烘烤除气。要防止油带入真空室内，注意油扩散泵返油，对加热功率高的扩散泵必须采取挡油措施。 Cleaning the dust in the coating room, setting up a high cleanliness workshop and keeping the indoor high cleanliness are the basic requirements of the coating process for the environment. In areas with high air humidity, besides the substrate and parts of the vacuum chamber should be cleaned carefully before plating, baking and degassing should also be carried out. In order to prevent oil from entering the vacuum chamber, pay attention to the oil return of the oil diffusion pump, the high heating power diffusion pump must take measures to block oil. |
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