| 真空镀膜机使用步骤 |
| 添加时间：2018/11/16 14:43:53 浏览次数： |
| 电控柜操作 Electric cabinet operation 1. 开水泵、气源。 1. boiling water pump, gas source. 2. 开总电源。 2. turn on the main power. 3. 开维持泵、真空计电源，真空计档位置V1位置，等待其值小于10后，再进入下一步操作。约需5分钟。 3. Turn on and maintain the power supply of the pump and vacuum gauge, and the position of the vacuum gauge V1. Wait until its value is less than 10, then proceed to the next step. It takes about 5 minutes. 4. 开机械泵、预抽，开涡轮分子泵电源、并启动，真空计开关换到V2位置，抽到小于2为止，约需20分钟。 4. Turn on the mechanical pump, pre-pumping, Turbomolecular pump power supply, and start up. The vacuum gauge switch is changed to V2 position and pumped to less than 2, which takes about 20 minutes. 5. 观察涡轮分子泵读数到达250以后，关预抽，开前级泵和高真空阀继续抽真空，抽真空到达一定程度后才能开右边的高真空表头，观察真空度。真空到达2×10-3以后才能打开电子枪电源。 5. After the reading of turbomolecular pump reaches 250, turn off the pre-pumping, open the front stage pump and high vacuum valve and continue to vacuum. After the vacuum reaches a certain level, the high vacuum meter on the right side can be opened to observe the vacuum degree. When the vacuum reaches 2 * 10-3, the power of the electron gun can be switched on. DEF-6B操作 DEF-6B operation 1. 总电源。 1. total power supply. 2. 同时开电子枪控制Ⅰ和电子枪控制Ⅱ电源：按电子枪控制Ⅰ电源、延时开关，延时、电源及保护灯亮，三分钟后延时及保护灯灭，若后门未关好或水流继电器有故障，保护灯会常亮。 2. At the same time, turn on the power supply of the electronic gun control I and the electronic gun control II: control the power supply I and the delay switch according to the electronic gun, the delay, the power supply and the protection lamp are on, three minutes later, the delay and the protection lamp are off. If the back door is not closed or the water flow relay is faulty, the protection lamp will always be on. 3. 开高压，高压会达到10KV以上，调节束流可到200mA左右，帘栅为20V/100mA，灯丝电流1.2A，偏转电流在1~1.7之间摆动。 3. Turn on the high voltage, the high voltage will reach above 10KV, adjust the beam current to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1 and 1.7. 关机顺序 Shutdown sequence 1. 关高真空表头、关分子泵。 1. turn off high vacuum head and off molecular pump. 2. 待分子泵显示到50时，依次关高阀、前级、机械泵，这期间约需40分钟。 2. pending molecular pump display to 50, turn off the high valve, the front stage, the mechanical pump, which takes about 40 minutes. 3. 到50以下时，再关维持泵。 3. to 50 below, then turn off the maintenance pump. |
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